可调谐外腔半导体激光器具有线宽窄、调谐范围宽、单模输出、输出功率高等优良特性, 在白光干涉测量技术、波分复用系统、相干光通信、光纤传感等领域有着广泛的应用。文章首先介绍了可调谐外腔半导体激光器的基本原理以及各种典型外腔结构的调谐机理, 然后根据外腔结构阐述了各种可调谐外腔半导体激光器的最新研究进展, 分析了不同外腔结构的优缺点, 最后对可调谐外腔半导体激光器的不足进行了总结, 展望了其未来发展趋势。

Tunable external cavity diode laser(ECDL)has excellent characteristics such as narrow linewidth, wide range tuning, single-mode output and high output power. Tunable ECDL is widely used in white light interferometry, wavelength division multiplexing system, coherent optical communication, optical fiber sensor technology, etc. In this paper, the basic principles of tunable ECDL and the tuning mechanisms of various typical external cavity structures are introduced firstly. Then the latest domestic and overseas research progresses of various tunable ECDL are expounded according to different external cavity structures, and the advantages and disadvantages are also analyzed. Finally, the existing shortcomings and future development trends of tunable ECDL are summarized and prospected.