Chinese Optics Letters, 2013, 11 (4): 041405, Published Online: Mar. 19, 2013
Effects of prism beam expander and slits on excimer laser linewidth narrowing module Download: 783次
Abstract
Theoretical simulation and experiments based on a prism beam expander and an echelle grating are conducted to study the dependence of linewidth and pulse energy on incidence angle and slit width. With a larger prism incident angle or narrower slit width, the linewidth becomes narrower while the laser pulse energy becomes lower. However, the pulse energy can be improved by optimally designing the prism beam expander. In addition, a subpicometer linewidth ArF laser is obtained with a double-prism beam expander and an echelle grating.
Haibo Zhang, Zhijun Yuan, Jun Zhou, Yunrong Wei, Qihong Lou. Effects of prism beam expander and slits on excimer laser linewidth narrowing module[J]. Chinese Optics Letters, 2013, 11(4): 041405.