光功率分配器(OPS)是光子集成电路的基本元件之一,广泛应用于多种领域。功率分配比(PSR)可调的OPS可提高光子集成电路的灵活性,简化光子集成电路系统。提出了一种硅基PSR大范围可调的OPS集成芯片方案,通过将对称2×2多模干涉仪、波导光栅和狭缝结构等硅基器件结合在一起,并改变输入光信号的波长和微型热光调制器两端加载的电压,实现了大范围可调的PSR。实验结果表明,本方案得到的两种OPS结构可分别在6.72 nm和5.56 nm波长范围内实现0.51~36.91和0.88~230.46的PSR变化;在50 ℃的温度变化下,可实现8.58~29.75和5.01~425.43的PSR变化。且该OPS具有尺寸小、质量轻、灵活性高等优势,可广泛应用于光开关、信道划分、功率分配等通信和信号处理领域。

Optical power splitter (OPS) is one of the basic components in photonic integrated circuits and it is widely used in many fields. The OPS with tunable power splitting ratio (PSR) can enhance the flexibility of photonic integrated circuits and simplify the photonic integrated circuit system. We propose an integrated chip scheme Si-based OPS with large tunable range of PSR. The scheme combines Si-based devices such as a symmetric 2×2 multimode interferometer, a waveguide grating, and a slot structure. By varying the wavelength of the input signal and adjusting the voltages applied at both ends of the thermo-optic micro modulator, the wide range adjustable PSR is realized. Experimental results show that the two OPS structure can obtain PSR changes 0.51--36.91 and 0.88--230.46 respectively within the wavelength range of 6.72 nm and 5.56 nm, respectively, and PSR changes of 8.58--29.75 and 5.01--425.43 in the temperature changes by 50 ℃. The OPS has the advantages of small size, light weight, and high flexibility, which can be widely used in optical switch, channel division, power distribution and other communication and signal processing fields.