光子学报, 2020, 49 (2): 0223002, 网络出版: 2020-03-19   

高Q值薄壁液芯毛细管微腔电场传感器 下载: 618次

Liquid-core, Thin-wall Microcapillary Electric Field Sensor with High Quality Factor
作者单位
南京邮电大学 电子与光学工程学院、微电子学院, 南京 210023
摘要
为提高电场传感器的抗电磁干扰能力、灵敏度和稳定性,将高Q值薄壁液芯毛细管微腔和电泳效应结合,增强回音壁模共振微腔对外加电场的感知能力,并进行了实验验证.基于时域有限差分法得到了液芯毛细管微腔回音壁模式共振特性随毛细管直径、壁厚等结构参数的变化规律,发现随着壁厚变薄灵敏度增加.采用熔融拉锥法制备了直径为86 μm,壁厚约为2 μm的薄壁毛细管微腔,通过高精度位移平台实现了锥形光纤和毛细管微腔的高效率耦合,测得回音壁模式Q值为2.8×106.毛细管微腔内注入不同浓度的蛋白质溶液,利用电泳原理和蛋白质分子在缓冲溶液里带电的特性,实现的最大电场传感灵敏度为10.6 pm/(kV/m).
Abstract
In order to improve the anti-interference ability, sensitivity and stability of the electric field sensor, a high Q thin-walled liquid-core capillary microcavity combined with the electrophoretic effect is proposed and experimentally demonstrated for the first time. In this paper, whispery gallery mode resonance of liquid-core microcapillary with different diameter and the wall thickness is theoretically simulated and analyzed based on the finite-difference time domain method and that sensitivity increases with decreasing wall thickness is concluded. Microcapillary resonator with diameter of 86 μm, wall thickness of 2 μm and a Q factor of 2.8×106 is fabricated. Using the principle of electrophoresis and the charge of protein molecules, we built an electric field test system. Liquid core microcapillary with different protein solutions achieves the maximum electric field sensitivity of about 10.6 pm/(kV/m).

周权, 陈瑶, 韩丰恺, 沈志平, 张祖兴, 万洪丹. 高Q值薄壁液芯毛细管微腔电场传感器[J]. 光子学报, 2020, 49(2): 0223002. Quan ZHOU, Yao CHEN, Feng-kai HAN, Zhi-ping SHEN, Zu-xing ZHANG, Hong-dan WAN. Liquid-core, Thin-wall Microcapillary Electric Field Sensor with High Quality Factor[J]. ACTA PHOTONICA SINICA, 2020, 49(2): 0223002.

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