针对数据中心互连用波分复用芯片需求，采用折射率差为1.5%的硅基二氧化硅光波导，设计并制备了应用于数据中心发射端的同侧、小型化、低损耗4通道粗波分复用芯片，尺寸为6.6 mm×2.2 mm，最小插入损耗小于2.33 dB，1 dB带宽大于11.35 nm，偏振相关损耗小于0.14 dB，波长精准度偏差小于0.38 nm。完全满足数据中心光互连波分复用芯片商用指标要求。

A silicon based optical waveguide with 1.5% refractive index difference is used for data center interconnect on wavelength-division multiplexing chip. A 4-channel chip with same side， small size and low loss is designed and fabricated for data center transmitter. The size of the chip is 6.6 mm×2.2 mm， the minimum insertion loss is less than 2.33 dB， the 1 dB bandwidth is more than 11.35 nm， the polarization dependent loss is less than 0.14 dB， and the wavelength accuracy deviation is less than 0.38 nm. The optical performance can meet the wavelength-division multiplexing commercial specifications of the data center optical interconnect.