针对太赫兹光束的光斑直径较大和传输途径不同的现状，提出大面元太赫兹热释电探测器和多用途探测器结构研究，用于自由空间和波导传输太赫兹光束功率的测试。首先使用有限元分析软件建立太赫兹热释电探测器模型，开展热电耦合仿真设计；其次使用精密研磨抛光工艺、平面集成电路微纳米加工技术、匀胶与剥离工艺、砂轮划片技术等工艺技术，开展太赫兹热释电探测器研制；最后创新设计装配在探测器结构上的套筒与波导适配器。理论分析和实验结果表明：该方法设计的太赫兹热释电探测器具有噪声等效功率低、重复性高特点，并且解决了自由空间与波导传输太赫兹辐射功率兼容测试问题。

In view of the large diameter and different transmission channels of terahertz beam, the large area terahertz pyroelectric detector and the multi-purpose detector structure were proposed to measure the terahertz beam power, which was transmitted in free space and waveguide. Firstly, a terahertz pyroelectric detector model was established by using the finite element analysis software, and the thermoelectric coupling simulation design was carried out. Secondly, the terahertz pyroelectric detector was developed by using precision grinding and polishing process, micro-nano processing technology of planar integrated circuit, homogenized and peeling process, and grinding wheel slicing technology. Finally, the sleeve and waveguide adaptor mounted on the detector structure were innovatively designed. Theoretical analysis and experimental results show that the terahertz pyroelectric detector designed in this method has the characteristics of low noise equivalent power and high repeatability, and solves the compatibility test problem of terahertz radiation power transmitted in free space and waveguide.