激光与光电子学进展, 2021, 58 (3): 0312004, 网络出版: 2021-03-12   

三通道调频连续波激光干涉位移测量系统

Three-Channel Frequency-Modulated Continuous-Wave Laser Interferometric Displacement Measurement System
作者单位
1 西安工业大学电子信息工程学院,陕西 西安 710021
2 西安工业大学光电工程学院,陕西 西安 710021
摘要
针对传统调频连续波激光干涉位移传感器存在谐波串扰和动态测量范围较小的问题,研制一种具有三个独立法布里-珀罗干涉仪探测光路的三通道位移测量系统,该系统包含三个芯片,使用多芯片处理可以提高运算速度。通过信号线等长和软件来控制各芯片的同步测量,可以解决各独立通道测量不同步的问题。实验结果表明,各通道对速度为1 mm/s的运动目标的同步性测量误差仅为0.46 nm,600 mm行程的位移测量误差的标准差小于3 nm,线性拟合系数在0.99997以上,说明该系统可以实现三维运动目标的位移测量。
Abstract
Aiming at the problems of harmonic crosstalk and small dynamic measurement range in traditional frequency modulation continuous wave laser interferometer displacement sensors, a three-channel displacement measurement system with three independent Fabry-Perot interferometer detection optical paths is developed. The system includes three chips, and the operation speed can be improved by using multi-chip processing. The simultaneous measurement of each chip is controlled by the equal length of the signal line and software, which can solve the problem of non-synchronization of the independent channel measurement. The experimental results show that the synchronization measurement error of each channel for a moving target with a velocity of 1 mm/s is only 0.46 nm, the standard deviation of the displacement measurement error of a 600 mm stroke is less than 3 nm, and the linear fitting coefficient is above 0.99997, indicating that this system can achieve the displacement measurement of three-dimensional moving targets.

盛启明, 郑刚, 张雄星, 孙彬, 井李强, 韩园. 三通道调频连续波激光干涉位移测量系统[J]. 激光与光电子学进展, 2021, 58(3): 0312004. Sheng Qiming, Zheng Gang, Zhang Xiongxing, Sun Bin, Jing Liqiang, Han Yuan. Three-Channel Frequency-Modulated Continuous-Wave Laser Interferometric Displacement Measurement System[J]. Laser & Optoelectronics Progress, 2021, 58(3): 0312004.

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