激光与光电子学进展, 2021, 58 (5): 0500005, 网络出版: 2021-04-17
飞秒激光制备微透镜阵列的研究进展 
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Research Progress of Femtosecond Laser Fabrication of Microlens Array
激光光学 飞秒激光 微透镜阵列 双光子聚合 激光烧蚀 湿法刻蚀 干法刻蚀 laser optics femtosecond laser microlens array two-photon polymerization laser ablation wet etching dry etching
摘要
微透镜阵列是重要的微光学元件，其以良好的成像性能以及小型化、轻型化的优点，被广泛应用于光通信、光信号处理、波前传感、光场调控、数据存储、医学诊断等领域。飞秒激光加工技术具有可控度高、灵活性好、无需掩模、加工精度高等优势，成为近年来微透镜阵列的重要加工方式。本文综述了微透镜阵列飞秒激光加工方法的研究进展，包括飞秒激光双光子聚合加工和化学刻蚀辅助飞秒激光烧蚀加工，介绍了微透镜阵列的应用，分析了制备微透镜阵列的飞秒激光加工方法存在的问题和发展趋势。
Abstract
As a significant micro-optical element， microlens arrays are widely used in optical communication， optical signal processing， wavefront sensing， optical field regulation， data storage， medical diagnosis， and other fields owing to their good imaging performance and miniaturization and lightening advantages. Femtosecond laser processing technology exhibits high controllability， good flexibility， no masking requirement， and high processing accuracy， and it has recently become an important processing method for microlens arrays. Herein， the research progress of femtosecond laser processing methods for microlens arrays， including two-photon polymerization and chemical-etching-assisted ablation， were summarized. Additionally， the application of microlens arrays was introduced， and the problems and development trends pertaining to the femtosecond laser processing method for microlens arrays were analyzed.
杨雪, 孙会来, 岳端木, 孙建林. 飞秒激光制备微透镜阵列的研究进展[J]. 激光与光电子学进展, 2021, 58(5): 0500005. Xue Yang, Huilai Sun, Duanmu Yue, Jianlin Sun. Research Progress of Femtosecond Laser Fabrication of Microlens Array[J]. Laser & Optoelectronics Progress, 2021, 58(5): 0500005.
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