激光与光电子学进展, 2021, 58 (8): 0815006, 网络出版: 2021-04-16  

微小型光学元件尺寸的视觉测量系统研制 下载: 725次

Development of Visual Size-Measurement System for Micro-Optical Components
作者单位
中国计量大学计量测试工程学院, 浙江 杭州 310018
摘要
设计了一种微小型光学元件尺寸的视觉测量系统。提出一种穹顶光和同轴光结合的暗场散射照明方案来突出元件的表面特征;利用子区域和全图的亮度差值进行光照补偿,以消除边缘重影;针对边缘局部亮度过高且不均的问题,使用基于区域分割的Otsu算法提取边缘。使用最小二乘法拟合元件边缘计算尺寸。实验结果表明:基于区域分割的Otsu算法测量长和宽的平均误差分别为1.5 μm和4.1 μm,较Canny边缘检测算法测量的结果,减小了10 μm以上,测量不确定度为0.5 μm和1.1 μm,较改进前的算法,受光照影响小,准确度和鲁棒性更高。
Abstract
In this work, we designed a visual size-measurement system for micro-miniature optical components. We proposed a dark-field scattering illumination scheme combining dome light and coaxial light to highlight the surface features of the element and used the brightness difference between the subregion and the full image for illumination compensation to eliminate edge ghosting. For the excessively high and uneven local edge brightness, we used a region segmentation-based Otsu algorithm to extract edges. In addition, we used the least square method for the component edge-fitting to calculate the size. Experiment results show that the region segmentation-based Otsu algorithm has an average error of 1.5 and 4.1 μm for measuring length and width, respectively, which reduced by more than 10 μm compared to the Canny edge detection algorithm-based measurement results. The measurement uncertainties of the region segmentation-based Otsu algorithm are 0.5 and 1.1 μm for length and width, respectively. The system is less affected by light, and the accuracy and robustness are higher than the algorithm before improvement.

赵美丹, 余桂英, 瞿永顺, 林瑞杰, 林敏. 微小型光学元件尺寸的视觉测量系统研制[J]. 激光与光电子学进展, 2021, 58(8): 0815006. Meidan Zhao, Guiying Yu, Yongshun Qu, Ruijie Lin, Min Lin. Development of Visual Size-Measurement System for Micro-Optical Components[J]. Laser & Optoelectronics Progress, 2021, 58(8): 0815006.

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