中国激光, 2018, 45(9): 0911001, 网络出版: 2019-05-08

可调谐二极管激光吸收光谱技术的应用研究进展

Research Progress on the Application of Tunable Diode Laser Absorption Spectroscopy
作者单位

1中国科学院合肥物质科学研究院, 安徽光学精密机械研究所, 安徽 合肥 230031

2中国科学技术大学, 安徽 合肥 230026

摘要
随着半导体激光器的发展,可调谐二极管激光吸收光谱(TDLAS)技术有了巨大的进步,应用领域迅速扩大。已经有超过1000种TDLAS仪器应用于连续排放监测以及工业过程控制等领域,每年全球出售的TDLAS气体检测仪器占据了红外气体传感检测仪器总数的5%~10%。运用TDLAS技术,已经完成了几十种气体分子的高选择性、高灵敏度的连续在线测量,实现了不同领域气体浓度、温度、流速、压力等参数的高精度探测,为各领域的发展提供了重要的技术保障。本文综述了TDLAS技术气体检测的原理以及最近的应用研究进展,主要从大气环境监测、工业过程监测、深海溶解气体探测、人体呼吸气体测量、流场诊断以及液态水测量六个应用领域进行介绍。
Abstract
With the development of semiconductor lasers, tunable diode laser absorption spectroscopy (TDLAS) technology has achieved great development and rapid expansion of application fields. There have been more than 1000 kinds of TDLAS instruments, which are applied to continuous emission monitoring and industrial process control fields. According to the statistics, 5%-10% of all infrared gas sensors based on TDLAS technology are sold in the world every year. Dozens of gases are measured on-line with high sensitivity and precision by the TDLAS technology, and gas parameters, including concentration, temperature, velocity and pressure, are also determined, which provide important technical support for the development of various fields. This article reviews the principle and recent research of TDLAS technology, with introduction from six application fields, such as atmospheric environmental monitoring, industrial process monitoring, deep sea dissolved gases detection, breath analysis, flow field diagnosis, and liquid water measurement.
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