为计算和评估光斑矩参量阵列测试法的测量不确定度,以光斑矩参量积分表达式为出发点,推导了零阶近似下光斑矩参量的离散表达式,初步分析了光强分布数据中单元位置及探测光功率的测量不确定度。在此基础上,根据不确定度传递律,推导了阵列测试法下光斑矩参量测量不确定度的一般表达式。进一步得到了数种常用简化条件下的矩参量不确定度表达式,并进行了相应的分析。由此建立了光斑矩参量计算及其不确定度评定的一套完整方法。利用简化公式,对自行研制的激光光斑分析仪和通用的CCD面阵探测器的光斑矩参量测量不确定度进行了分析,给出了计算表达式。

To calculate and to evaluate uncertainty of spot moment parameters measured with array detectors are the main goals. First, according to the integral expression of spot moment parameters, the corresponding discrete expressions of them are derived approximating zero order, and uncertainties of position and light power of every detector unit are analyzed preliminarily. General expressions of uncertainty of spot moment parameters are derived according to the transfer law of uncertainty. And then several simple forms of them are derived on corresponding conditions. So the methods of calculating spot moment parameters and evaluating the uncertainty of them are completely developed. Analysis on uncertainty of spot moment parameters measured with laser intensity distribution analyser (LIDA) and CCD are provided at last.