对复合层微悬臂梁红外探测器进行了理论分析,并建立了相应的理论模型,实验研究了在硅基底上生长碳纳米管的吸热特性,优化设计了一种生长有碳纳米管的三层硅微悬臂梁谐振式红外探测器。该探测器基于复合层微悬臂梁的谐振频率随着微悬臂梁温度的改变发生漂移的特性,在一定的红外辐射下,微悬臂梁的温度会随着辐射光强的强弱而发生变化,从而根据微悬臂梁谐振频率的漂移而感知温度变化实现对辐射光的探测,利用碳纳米管的红外吸收特性,在二层微悬臂梁上生长碳纳米管薄膜作为吸收层,提高了微悬臂梁探测器的红外吸收性能。研究表明

The theoretical model of the composite microcantilever used in the IR radiation is given based on the theoretical analyses, the infrared absorption characteristics of carbon nanometer tube (CNT) is studied by experiment. A tri-layer microcantilever sensors with CNT film is designed to detect the infrared radiation. The detector is based on the characteristics that the resonance frequency of composite microcantilever shift with the temperature. So, the resonance frequency of microcantilever can be used as sensitive parameter to measure the infrared thermal radiation. The theoretical analysis and simulation results show that this new model can attain power sensitivity of fWtwo orders of magnitude better than the sensitivity of traditional statical ones. Furthermore, the micro-electro-mechanical system (MEMS) sensor could be compatible with integrated circuit technology.