超分辨技术中现有的纯振幅型或纯相位型光瞳滤波器,大部分只能实现轴向或横向超分辨而不能实现三维超分辨,三维超分辨在三维成像系统中有着重要的作用。因此为提高成像系统中的三维分辨能力,设计了一种复振幅光瞳滤波器,并对其三维超分辨性能进行了研究。详细分析了该光瞳滤波器的第一区半径和透射率对施特雷尔比、轴向和横向超分辨因子以及旁瓣能量的影响。通过一系列的模拟证明,借助于复振幅光瞳滤波器可以实现三维超分辨。该滤波器的优点是容易实现三维超分辨,且有比较高的施特雷尔比,缺点是三维超分辨的实现总是伴随着旁瓣能量的增加,但可以采用共焦扫描成像系统来加以抑制。

At present, in the superresolution technique most of pure amplitude or pure phase filters only can realize transverse or axial superresolution, but cannot aehieve the three-dimensional superresolution which play an important role in the three-dimensional imaging systems. So in order to improve the three-dimensional resolving power of optical imaging system, a new set of complex amplitude pupil filter is designed, and its three-dimensional superresolving performances are studied. The effects of the radius and the transmittance of the first zone on the Strehl ratio, the transverse and axial gains, and the side lobes are analyzed in detail. With a series of simulation examples of such filter, it can be concluded that three-dimensional superresolution can be realized with the compleamplitude pupil filter. Advantage of such filter is easy to realize three-dimensional superresolution with high Strehl ratio. And disadvantage is that the influence of the side lobes is greater for some systems. But it can be suppressed by applying confocal scanning imaging systems.