在研究动态主动调焦法测量原理的基础上,提出一种新型的动态主动调焦式激光测头的检测方法。该检测方法的核心原理是将位移量的测量转换成了时间差的测量,从而简化了激光测头的结构,提高了激光测头的测量精度和稳定性。介绍了所设计的高精度激光测头测量系统,并对激光测头进行了动态特性的实验。结果表明激光测头的测量分辨力为0.075 μm,测量线性度为0.45 μm,测量范围为±0.1 mm。

Based on a study optical dynamic active confocal probe, a new method of the measuring deviation focus is developed. The key point of this new method is that displacement of the turning fork is converted to time difference measurement, thus the optical and mechanical structures of the laser probe system can be simplified greatly, and its accuracy and stability are enhanced. A new high integration measurement system is designed, and systematic experiments resulted of the including linearity, measuring range and performance were carried out.