设计研制了一种小体积、低成本、可扩展的低电压非硅基底1×4微机电系统光开关。开关单元由电磁驱动,微反射镜绕直径100 μm转轴转动,驱动电压为5 V,开关时间小于2 ms,插入损耗小于0.84 dB,具有断电自锁功能。器件构造工艺采用微细电火花加工技术。用有限元法分析受力和磁场,进行结构优化设计,并着重介绍开关的实现及性能。

A fiber optic switch based on a novel micro-electromechanical system (MEMS) technology is developed, allowing fast switch (<2 ms), excellent isolation (>50 dB) and wide bandwidth. Each switch module consists of an electromagnetically actuated gold coated silicon mirror rotating around a 100 μm diameter shaft and a miniature 5 V driven coil. Enabling technology is of precision EDM machining. The switch is scalable to 8×8 and allows the realization of high capacity cross connects.