提出一种新的超分辨记录点的读出技术D超分辨反射膜技术,详细分析了其原理。用该技术,以Sb为超分辨反射膜,SiN为介电层,在激光波长为632.8 nm和光学头的数值孔径为0.40的读出光学系统中实现了直径为380 nm的超分辨记录点的读出。同时研究了Sb薄膜厚度对读出信噪比的影响规律,发现最佳的Sb薄膜厚度为28～30nm,所得的信噪比为38～40 dB。

A novel approach to the super-resolution pits readout--super-resolution reflective film technique was put forward, and its principle was analyzed in detail. By using Sb as the super-resolution reflective layer and the SiN as dielectric layer, the super-resolution pits with a diameter of 380 nm were read out by the readout optics system (the laser wavelength is 632.8 nm and numerical aperture is 0.40). The influence of the Sb thin film thickness on the readout signal was investigated, the results showed that the optimum Sb thin film thickness is 28～30 nm, and the maximum signal-noise ratio is 38～40 dB.