光学学报, 2001, 21 (7): 829, 网络出版: 2006-08-10   

1064 nm窄带干涉滤光片激光破坏研究

Laser Induced Damage of 1064 nm ZnS/MgF2 Interference Filter
作者单位
1 中国科学院上海光学精密机械研究所薄膜技术中心,上海 201800
2 中国工程物理研究院流体物理研究所,绵阳610900
摘要
干涉滤光片由于内部谐振场共振吸收特性,其激光破坏过程有别于全反膜而具有特殊的性质。本文从谐振场及温度场理论出发,计算得出了ZnS/MgF2为主材料的滤光片的谐振场及温度场分布规律。在此规律指导下,对相同膜系结构的一系列滤光片的激光破坏阈值、吸收及破坏形貌进行了测量与分析,结合实验结果对干涉滤光片独具特色的破坏发展过程作出了描述,并给出了一定的解释。
Abstract
Due to the resonant absorption of interference infrared filters at high power density laser radiation, the laser damage properties of such coatings are significantly different from the high reflective coatings and antireflective coatings. In order to understand the damage behavior of this type of coatings, a series of experiments have been done. The damage threshold for several infrared filters composed of multilayer of ZnS/MgF 2 were determined by irradiation from Nd∶YAG laser. The absorption measurements of such coatings have been performed by the surface thermal lensing (STL) technique. The relationship between damage morphology and damage growth has been studied in detail. The empirical data is compared to theoretical predictions. The interesting phenomena are that most of the initial damage occurs not at the surface layers but inside of the multilayer films, where ZnS is sublimed to form many little air bubbles. Using the electric distribution and temperature field distribution theoretical calculating, the explanation is given. It is concluded that the laser damage properties of such infrared filters are in agreement with theoretical prediction.

胡海洋, 范正修, 罗福. 1064 nm窄带干涉滤光片激光破坏研究[J]. 光学学报, 2001, 21(7): 829. 胡海洋, 范正修, 罗福. Laser Induced Damage of 1064 nm ZnS/MgF2 Interference Filter[J]. Acta Optica Sinica, 2001, 21(7): 829.

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