设计并制作了一种能直接与通信用标准单模光纤阵列相耦合的1×16多模干涉型光功分器。其输入、输出单模波导采用离散谱折射率法优化设计，获得了脊宽为3μm、脊高为2.9μm和理论传输损耗约为0.028dB/cm的单模脊形光波导。分析表明，这种深刻蚀多模干涉型光功分器具有较大的制作容差性、较宽的工作带宽以及几乎可忽略的极化依赖性。测试结果表明，器件实现了1×16光功分器功能。

A 1×16 multimode interference (MMI) optical power splitter which allows for connecting with the standard single mode fiber arrays for optical communication directly is designed and fabricated. The input and output single mode waveguides are optimized by the discrete spectral index method (DSIM). Single mode rib waveguide with low theoretical propagation loss (～0.028 dB) and with rib width of 3 μm and rib height of 2.9 μm is obtained. Analysis shows that the deep etched MMI optical power splitter has large fabrication tolerance, big bandwidth and insensitive polarization. The measurement results show that the function of 1 to 16 uniform splitting has been realized in the device.