光学学报, 2004, 24 (1): 18, 网络出版: 2006-06-12
溶胶-凝胶法制备耐磨宽带SiO2/TiO2增透膜
Broadband and Scratch-Resistant Antireflective Coating Composed of SiO2/TiO2 Prepared from Sol-Gel Processing
薄膜物理学 溶胶-凝胶 宽带增透膜 表面均匀 耐擦除 film physics sol-gel broadband antireflective coatings even surface scratch-resistant
摘要
以钛酸正丁酯[Ti(OBu)4]、正硅酸乙酯(TEOS)为原料,采用溶胶-凝胶(sol-gel)提拉方法在K9光学玻璃基片上镀制得高透过的λ/4～λ/2型宽带增透膜.该增透膜的表面均匀性良好,均方根粗糙度(RMS)为1.201,平均粗糙度(RA)为0.934,具有一定的耐擦除性.经200 ℃热处理,膜层中的OH吸收峰已基本消失,在400～700 nm光谱范围的透过率比基片的平均透过率提高6.6%.为实现大面积涂覆"神光"装置主放大器的防爆隔板玻璃,大幅度提高主放大器的抽运效率奠定基础.
Abstract
type of λ/4～λ/2 broadband antireflective coating has been developed by sol-gel dipping method with tetrabutylorthotitanate and tetraethoxysilane (TEOS) as precursors. This antireflective coating possesses smooth and even surface,its average roughness is estimated having the value of RMS (1.201) and RA (0.934),and the specific scratch-resistant is good. Most -OH groups are eliminated at the temperature near 200 ℃. The average transmission of both-coated K9 substrate is increased 6.6% higher than uncoated one in the spectra from 400 nm to 700 nm. The antireflective coating is expected to coat amplifier blastshields of "Sheng-Guang: facility for enhancing the pumping efficiency of amplifiers
贾巧英, 乐月琴, 唐永兴, 姜中宏. 溶胶-凝胶法制备耐磨宽带SiO2/TiO2增透膜[J]. 光学学报, 2004, 24(1): 18. Qiaoying Jia, Yueqin Le, Yongxing Tang, Zhonghong Jiang. Broadband and Scratch-Resistant Antireflective Coating Composed of SiO2/TiO2 Prepared from Sol-Gel Processing[J]. Acta Optica Sinica, 2004, 24(1): 18.
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