光学学报, 2002, 22 (3): 344, 网络出版: 2020-08-12
微机构可调谐阵列滤光片的有限元分析
Finite Element Analysis of Tunable Optical Filter Array Based on Microstructure Technique
摘要
提出一种新颖的采用薄膜技术在玻璃基底上构造微机构可调谐二维窄带滤光片阵列的方法.在有限元分析的基础上,计算出器件在静电力作用下三维变形曲面结果,并模拟了透过光谱特性.
Abstract
A new method is proposed to build a micromachined tunable optical filter array on glass base in visible band. The analysis result based on finite element shows that the optical performance is strongly influenced by the curved 3 D surface of the suspended electrostaticly driving layer.
陈旻, 刘旭, 李海峰. 微机构可调谐阵列滤光片的有限元分析[J]. 光学学报, 2002, 22(3): 344. Chen Min, Liu Xu, Li Haifeng. Finite Element Analysis of Tunable Optical Filter Array Based on Microstructure Technique[J]. Acta Optica Sinica, 2002, 22(3): 344.