光学学报, 2002, 22 (4): 452, 网络出版: 2006-08-08
偏光干涉在物体几何形貌检测中的应用
Application of Conoscopic Interference in Geometric Profilometry
晶体双折射 偏光干涉 光学非接触测量 birefringence of anisotropic crystals conoscopic interference no contact measuring
摘要
提出了一种应用晶体光学原理的新型物体几何形貌检测方法,介绍了新方法涉及到的晶体偏光干涉的原理,以及基于这个原理的形貌信号检测方法,并通过实验得到新方法的测量精度约为5 μm,测量范围约为7 mm,且具有较好的动态特性.
Abstract
A new method that make use of the theory and techniques of crystal optics for geometric profilometry is presented. The theory of the conoscopic interference of crystal optics related with the new method is introduced, and the application of the new method in geometric profilometry is studied and some experimental results are given.
高翔, 张国雄, 李真. 偏光干涉在物体几何形貌检测中的应用[J]. 光学学报, 2002, 22(4): 452. 高翔, 张国雄, 李真. Application of Conoscopic Interference in Geometric Profilometry[J]. Acta Optica Sinica, 2002, 22(4): 452.