中国激光, 2001, 28 (5): 455, 网络出版: 2006-08-10
用于纳米精度大范围位移测量的半导体激光干涉仪
Laser Diode Interferometer Used to Measure Displacements in Large Range with a Nanometer Accuracy
纳米测量 光热调制 干涉仪 半导体激光器 光学检测 nanometer measurement photothermal modulation interferometer laser diode optical measurement
摘要
在光频光热调制半导体激光正弦相位调制干涉仪的基础上,提出了一种扩大其测量范围的方法,使得在保持纳米精度的前提下,测量范围由半个波长扩大为125.56μm,并讨论了进一步扩大测量范围的可能性。本方法得到了模拟计算和实验结果的很好验证。
Abstract
In this paper, a new method is proposed to enlarge the measurement range of the LD-SPM interferometer with a photothermal wavelength modulation. Using this method, the measurement range is enlarged from half wavelength to 125.56 μm and the measurement accuracy is 1.2 nm. The possibility of further enlarging the measurement range is discussed.
王学锋, 王向朝, 钱锋, 卢洪斌, 宋松, 步扬. 用于纳米精度大范围位移测量的半导体激光干涉仪[J]. 中国激光, 2001, 28(5): 455. 王学锋, 王向朝, 钱锋, 卢洪斌, 宋松, 步扬. Laser Diode Interferometer Used to Measure Displacements in Large Range with a Nanometer Accuracy[J]. Chinese Journal of Lasers, 2001, 28(5): 455.