中国激光, 2004, 31 (2): 142, 网络出版: 2006-06-12
980 nm高功率垂直腔面发射激光器 下载: 609次
980 nm High Power Vertical Cavity Surface Emitting Laser
激光技术 半导体激光器 垂直腔面发射激光器 分子束外延 量子阱结构 氧化工艺 laser technique semiconductor laser vertical cavity surface emitting laser molecular beam epitaxy quantum well structure oxidation process
摘要
研究了980 nm垂直腔面发射激光器(VCSEL)的结构设计和器件制作,实现了室温下的脉冲激射.在脉宽为50 μs,占空比为5:1000的脉冲电流下,直径400 μm的器件输出光功率最高可达380 mW,发散角小于10°,光谱的半高全宽为0.8 nm.
Abstract
980nm vertical cavity surface emitting laser had been fabricated, and the pulse operation with high output power had also been realized at room temperature (24℃). With 5/1000 duty cycle and 50 μs pulse duration, the maximum optical output power was 380 mW for 400 μm diameter device. The divergence angle was less than 10°, and the FWHM of lasing spectrum was 0.8 nm.
赵路民, 王青, 晏长岭, 秦莉, 刘云, 宁永强, 王立军. 980 nm高功率垂直腔面发射激光器[J]. 中国激光, 2004, 31(2): 142. 赵路民, 王青, 晏长岭, 秦莉, 刘云, 宁永强, 王立军. 980 nm High Power Vertical Cavity Surface Emitting Laser[J]. Chinese Journal of Lasers, 2004, 31(2): 142.