用光学显微镜分别测量了1.06 μm激光辐照硅、锗材料形成表面波纹的形貌特征.在激光辐照材料形成初始表面波纹之后,后继激光对最终波纹的增长起正反馈作用.当激光功率密度略大于材料损伤阈值时,材料表面呈现周期性的波纹结构;当激光功率密度远大于材料损伤阈值时,材料熔融区内出现无规则的随机分布波纹.激光辐照硅、锗材料产生的波纹结构与材料的性能、表面状况和实验中使用的激光参数密切相关.同时,分析了表面波纹结构对激光光束传输特性,以及激光与材料相互作用产生破坏效应的影响.

The surface ripple modality of Si/Ge material 1 06 μm laser-induced is measured by optical microscope. It indicates that the subsequent laser will cause positive feedback to increase the ripple after the appearance of laser-induced materials' initial ripple. When power density of laser beam is close to damage threshold, periodical ripple will present on surface of the material; and when the density exceeds damage threshold, stochastic distribution will appear in melting area of the material. The surface ripple modalities occur on Si and Ge materials whose characteristics are dependent on the material property, surface status. At the same time, the infections of the surface ripple structures are analyzed for the laser beam propagation characteristics and the damage effects of laser beam interactions with materials.