中国激光, 2004, 31 (3): 350, 网络出版: 2006-06-12
复合光源实时微振动干涉测量仪
Composite-Light-Source Interferometer for Real-Time Micro-Vibration Measurement
摘要
提出了一种新的实时微振动激光干涉测量仪.通过采用复合光源和反馈系统,有效地消除了激光二极管-正弦相位调制(LD-SPM)干涉仪中由电流调制所带来的测量误差和外界干扰所带来的影响,实现了物体微振动的纳米精度实时测量.
Abstract
A novel LD-SPM interferometer, which can be used to measure micro-vibrations with a high accuracy in real time, is proposed. In this paper, a composite light source is employed to decrease the measurement errors caused by the light-intensity changes. Experiments verify the usefulness of the interferometer.
李代林, 王向朝, 王学锋, 郭立萍, 刘英明. 复合光源实时微振动干涉测量仪[J]. 中国激光, 2004, 31(3): 350. 李代林, 王向朝, 王学锋, 郭立萍, 刘英明. Composite-Light-Source Interferometer for Real-Time Micro-Vibration Measurement[J]. Chinese Journal of Lasers, 2004, 31(3): 350.
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