中国激光, 2004, 31 (8): 959, 网络出版: 2006-06-12   

Sb∶SnO2/SiO2纳米复合薄膜的光学及气敏特性

Optical and Gas-Sensing Properties of Sb-Doped SnO2/SiO2 Nano-Composite Thin Films
作者单位
1 上海理工大学理学院光电功能薄膜实验室, 上海 200093
2 中国科学院上海光学精密机械研究所,上海 201800
摘要
采用溶胶-凝胶(sol-gel)工艺制备了Sb∶SnO2/SiO2复合膜。通过原子力显微镜(AFM)观察了薄膜样品的表面形貌,利用紫外-可见光谱,p-偏振光反射比角谱研究了复合薄膜的光学特性。结果表明,薄膜中的晶粒具有纳米尺寸(~35 nm)的大小,比表面积大,孔隙率高;薄膜的透光率高,可见光波段近95%;其光学禁带宽度约3.67 eV。因此Sb∶SnO2/SiO2纳米复合膜可作为气敏薄膜的理想选择。通过对三种不同的气体C3H8,C2H5OH及NH3气敏特性的测试表明,Sb掺杂大大提高了SnO2薄膜对C2H5OH的灵敏度,纳米Sb∶SnO2/SiO2复合膜的气敏灵敏度高于纯SnO2薄膜及Sb掺杂的SnO2薄膜。
Abstract
Sb-doped SnO2/SiO2 nano-composite thin films are prepared by sol-gel method. The surface topograph of the thin films is observed by atomic force microscopy (AFM). The optical properties of the thin films are studied by ultraviolet-visible spectra and p-polarized light reflectance angular spectrum. The results show that the crystalline grain size is about 35 nm, the specific surface area is large, and the duty porosity is high;the optical transmissivity is high, near 95% in visible spectrum range,and the optical band gap is about 3.67 eV. So Sb-doped SnO2/SiO2 nano-composition thin films is ideal candidate for optical gas-sensing. Further more, the gas-sensing test is made to three kinds of gas C3H8, C2H5OH and NH3, the results indicate, the doping of Sb to SnO2 films greatly improves the gas sensitivity to C2H5OH, and the gas sensitivity of Sb∶SnO2/SiO2 nano-composite thin films is higher than that of Sb∶SnO2 thin films.

顾铮天, 梁培辉, 张伟清. Sb∶SnO2/SiO2纳米复合薄膜的光学及气敏特性[J]. 中国激光, 2004, 31(8): 959. 顾铮天, 梁培辉, 张伟清. Optical and Gas-Sensing Properties of Sb-Doped SnO2/SiO2 Nano-Composite Thin Films[J]. Chinese Journal of Lasers, 2004, 31(8): 959.

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