现代移相式激光干涉仪在光学表面检测和光学系统像质评价中得到广泛的应用,但移相干涉术容易受到环境振动的干扰,时域移相的采样准确性受到影响,难以达到高精度测量的目标。为了进行振动环境下的在线测量,必须采用有效的抗振技术,目前具有这种抗振功能的干涉测试技术日益受到重视。从移相干涉图的采集、干涉仪的光学结构、振动的探测与补偿等角度介绍了移相干涉仪抗振技术的研究进展。

Modern phase-shift interferometer is widely applied in many fields including the testing of optical components and optical systems. But, vibration can easily lead to uncertainty of optical path phase difference in the interferometer and result in erroneous optical testing. Several methods have been developed for reducing the sensitivity of phase-shift interferometers to vibration during on-line measurement. In this paper, the development of vibration-resistant phase-shift techniques is introduced for gathering of phase-shift interferograms, optical structure, vibration detecting and compensation.