首先综述了微空心阴极放电的基本原理,然后详细论述了微空心阴极维持的辉光放电(MCSD)以及MCSD的放电参数对产生大体积高压辉光放电等离子体源的影响,最后论述了MCSD运行方式对产生高压辉光放电等离子体源的影响。

Microhollow cathode discharge(MHCD) is a novel, nonequilibrium, high-pressure glow discharge. This paper presents an overview of the research progress on the fundamental theory of the MHCD. The microhollow cathode sustained glow-discharge (MCSD) is discussed in particular, and then the discharge parameter of MCSD effecting on the generation of large-volume high-pressure glow discharge plasma sources is illustrated. The operation mode of the MCSD effecting on the generation of high-pressure glow discharge plasma source is also discussed finally.