针对高功率激光器中非均匀光斑热致变形导致光轴偏转的问题,提出用相变致冷镜作为腔镜来减小镜面变形峰谷值和角向偏转,在2kW连续二氧化碳激光器上进行了热变形和光束漂移实验.实验表明,与普通实心硅镜相比,相变致冷镜镜面温度分布更均匀,可有效地减小镜面偏转角和光斑中心漂移,提高远场光束质量.

In order to solve the optical axis deflection owing to asymmetric thermal deformation of mirror induced by irregular facula, phase change cooled mirror, which takes the place of normal silicon mirror, is presented to minimize PV value of deformation on mirror surface and mirror deflection. Online tests are carried out on 2kW CW carbon dioxide laser. The experimental results indicate that: Compared with normal silicon mirror, phase change cooled mirror achieves more uniform temperature field on surface. It can diminish angle of mirror deflection and centroid drift, and improve the beam quality in the far field.