理论上计算了入射距离747.4 mm及不同入射角情况下,日立变栅距凹面光栅的平场范围,确定了平场范围在30～50nm的一组平场谱仪的新设计参数.在原入射距离的情况下,新研制的平场谱仪在入射狭缝前加了一个轮胎镜,使谱仪具有空间分辨能力,且提高了收集效率,.利用一种真空紫外光谱灯对He气放电的特征谱线对平场谱仪进行了标定.在入射狭缝为 0.1mm时,实验上测得30.38nm谱线的宽度约为0.04mm, 在30nm附近的分辨率为0.001,在消像散波长40nm附近,分辨率将优于0.001.最后,利用标定后的平场谱仪对毛细管放电不同气体等离子体辐射进行了初步的测谱实验.

A flatfield spectrograph with a toroidal mirror at 747.4 mm incident distance was designed that can provide 30～50nm flat field and better space resolution. XUV spectrum from a hollow cathode gaseous discharge source filled with He gas was measured using this flatfield spectrograph. The spectrograph system can produce a spaceresolved spectral images with spectral resolution of 0.001 around 30nm with 0.1mm the incident slit. The spectrograph system will be used to detect the XUV emission from capillary discharge plasma. 