介绍了高速压电倾斜镜的结构和工作原理,根据拉格朗日方程建立了高速压电倾斜镜转动的运动微分方程,推导了其固有频率的解析式,并以有限元模型与实测结果作了比较,证明所推导的理论模型是可信的,它对高速压电倾斜镜的结构设计具有指导意义.

In this paper the construction and the operating principle of the fast piezo steering mirror are introduced, and the differential equation of the tilting motion is established according to the Lagrange's equation, the formula of the natural frequency is derived. The model analysis of the fast steering mirror is also carried out with the help of limited element analysis. The theoretic result fits with the result of experiment. The model results can be provided for the construction design of the fast steering mirror. 