在不同基底温度条件下,开展了千赫兹飞秒激光脉冲沉积类金刚石(DLC)薄膜的制备,通过改善激光参量和制备工艺,制备并研究了类金刚石薄膜的光学、力学和理化性能。实验采用单脉冲能量0.5～1.5 mJ,重复频率1 kHz,脉宽50 fs,波长800nm的激光烧蚀纯度为99.999%的石墨靶材,在石英,K9玻璃等多种材料上沉积了类金刚石薄膜,薄膜的平均生长速率约为85 nm/min。拉曼光谱测试得到了类金刚石薄膜双峰结构的拉曼光谱,其中D峰在1346 cm-1处,G峰在1574 cm-1处。在石英基底上制备的薄膜在1075～2700 nm的光谱范围内透射率可达87%以上,在2000 nm处达最大值90%,并且薄膜具有明显的红外增透性能。制备的薄膜经过酸碱浸泡和脱脂棉擦拭,无擦痕损伤。

Diamond-like carbon (DLC) thin films have been deposited with kHz femtosecond pulsed laser in different temperatures and the optical, mechanical and physicochemical properties of the deposited DLC are evaluated. The laser used in the experiment is a Ti:sapphire laser with the pulse width of 50 fs, wavelength of 800 nm, single pulse energy of 0.5～1.5 mJ and repetition rate of 1kHz. DLC on different substrates, such as quarts, optical K9 glass, is deposited with the focused laser beam ablating the graphite target with the purity of 99.999% at laser pulse energy between 0.5 mJ and 1.5 mJ. Raman spectrum indicates that the DLC have a structure of D band and G band located at 1346 cm-1 and 1574 cm-1, respectively. The infrared transmission of the DLC thin film on the quartz is more than 87% between 1075 nm and 2700 nm with the highest transmission of 90% around 2000 nm, and the apparent transmission-enhanced performance is observed. After dipped into the 10% vitriol for several days and wiped with absorbent cotton, no damage and scratch are found on the DLC thin films.