中国激光, 2006, 33 (suppl): 365, 网络出版: 2006-04-21
光束质量测试系统标定技术
Calibration Technique of Light Beam Quality Measurement System
测量 光束质量β因子 CCD远场测试法 参量标定 不确定度 optical measurement beam quality factor β CCD far field measurement method parameter calibration measurement uncertainty
摘要
光束质量一直是表征激光束输出质量的重要参量,测量方法有很多种。目前对于较强的带遮拦光束采用光束质量远场测试法。在光束传输效率领域内的应用中,使用光束质量β因子来评判光束质量性能参量,并通过CCD远场测试法测量得到。为了提高CCD远场法光束质量β因子测量系统的测试精度,分析了系统中光学部件和数据采集、处理部件的关键参量,针对不同的参量采用不同的标定方法分别对其进行标校。说明了实际使用的标校方法、分析测试系统的测量不确定度来源,定量确定了测量不确定度的大小。标定技术的研究从理论上促进了测量方法的进步,标校方法的应用有利于实际测试工作中测试结果准确度、可信度的提高。
Abstract
Beam quality is always an important parameter to value the output quality of laser beam, and many methods are developed. For high intensity laser beam with center obscuration, beam quality far field measurement method is used presently. The beam quality factor β is used to judge the performance parameters of the beam quality in the application of beam transport efficiency field, and it is obtained by CCD far field measurement. In order to advance measurement precision of the CCD far field beam quality factor β measurement system, the key parameters in optical elements and data collecting and processing courses are analyzed, and different calibration methods are used for different parameters. The calibration methods used in practice are explained, and the sources of the system measurement uncertainty are analyzed and determined quantificationally. The research of calibration methods promotes the advance of the measurement method, and the application of the calibration method benefits the improvement of the veracity and reliability of the measurement results in the practical measurement work.
田小强, 周文超, 彭勇, 解平, 胡晓阳. 光束质量测试系统标定技术[J]. 中国激光, 2006, 33(suppl): 365. 田小强, 周文超, 彭勇, 解平, 胡晓阳. Calibration Technique of Light Beam Quality Measurement System[J]. Chinese Journal of Lasers, 2006, 33(suppl): 365.