中国激光, 2006, 33 (suppl): 415, 网络出版: 2006-04-21
飞秒激光在微加工中的应用
Applications of Femtosecond Laser Micromachining
超快光学 飞秒激光 微加工 镀金薄膜 镀银薄膜 光栅 ultrafast optics femtosecond laser micromachining gold film silver film grating
摘要
采用波长800 nm,脉冲宽度150 fs,脉冲重复率1 kHz的飞秒激光,研究了在不同物质以及不同加工条件下的微加工特性,在镀金薄膜和镀银薄膜上获得了近衍射极限的刻线加工尺度,在半导体GaAs材料上制备了直径3 μm 的4×4点阵。 在加工速度为400 μm/s的条件下,在ZK6玻璃和LaF2玻璃上制备了透射式衍射光栅,光栅常数分别为2.5 μm和5 μm。
Abstract
The 800 nm, 150 fs, 1 kHz femtosecond laser micromachining for different materials under different processing conditions is studied. The diffraction-limited cutting on the gold and silver films is obtained, respectively. A 4×4 array holes with the diameter of 3 μm are drilled in the GaAs materials. The transmission gratings with the grating constant of 2.5 μm and 5 μm are fabricated into the ZK6 and LaF2 glasses at the machining speed of 400 μm/s.
高飞, 袁孝, 程光华, 赵卫. 飞秒激光在微加工中的应用[J]. 中国激光, 2006, 33(suppl): 415. 高飞, 袁孝, 程光华, 赵卫. Applications of Femtosecond Laser Micromachining[J]. Chinese Journal of Lasers, 2006, 33(suppl): 415.