为了得到满足微电子工业应用的微细薄膜器件,以实验的方法分析和研究了影响紫外激光切割金属薄膜的切割质量的主要因素,介绍了针对金属薄膜柔性系数高、容易变形等特点而采取的特殊的金属薄膜装夹方法。结果表明,在金属薄膜的紫外激光精密切割过程中,针对不同种类的金属薄膜选择合适的紫外激光输出功率及最佳切割速度有助于减少切缝宽度,获得较好的切缝质量;同时对金属薄膜选用合适的装夹方法,保证金属薄膜在精密切割过程中平整无变形,可有效地提高切割精度及微细薄膜器件加工的成功率。

In order to meet the demand of micro film apparatus in micro electronic industry, a series of experiments were carried out on the ultraviolet laser cutting thin metal film, and the effects of laser cutting parameters on the kerf width and quality were studied. Aiming at the high flexible coefficient and easy deformed etc. characteristics of thin metal film, a special clamp and cutting equipment was introduced. The results showed that during the process of the high power ultraviolet laser precise cutting, according to the kind and thickness of thin metal film, suitable ultraviolet laser power and cutting speed are selected to decrease the kerf width and good kerf quality is obtained; besides, suitable fixing method for the thin metal film is selected to ensure the thin film no distortion and improve the cutting precision and the success probability of the micro film apparatus machining effectively.