红外与激光工程, 2005, 34 (6): 691, 网络出版: 2006-05-31
基于光学聚焦方法的热驱动微执行器位移测量
Displacement measurement of a thermally actuated polymer micro robotic gripper using the optical focus method
微机电系统 SML算法 深度估计 Micro electrical mechanism systems Sum-modified-laplacian algorithm Depth estimation
摘要
随着微机电系统(MEMS)设计日趋成熟,度量问题越来越成为微系统技术中的热点.使用改进的拉普拉斯求和方法(SML)和深度估计法来测量热度驱动微夹持器末端的弯曲程度.实验中,使用了10幅在42℃时微夹持器的水下工作图像来验证这种光学聚焦方法,结果证明使用光学聚焦方法可以测量出作为驱动器反馈输入的末端弯曲大小,实现对驱动器运动的精确控制.
Abstract
With the maturing design of micro electrical mechanism systems （MEMS） , the metrology for MEMS is becoming the hot research in the micro system technology. In this paper, the summodified-laplacian （SML） focus measure and depth estimation method are used to measure the tip deflection of a thermally actuated polymer micro robotic actuator. Ten one underwater images of the micro actuator working at 42℃ have been used to illustrate the idea of measuring the tip deflection using optical focus method. The results can be used for metrology of MEMS. Optical focus method is used to measure the tip deflection, which can act as a feedback input to the actuator. Then, an accurate control of the motion of actuator can be achieved.
缪磊, 董再励, 陈浩然, 李文荣, 王越超. 基于光学聚焦方法的热驱动微执行器位移测量[J]. 红外与激光工程, 2005, 34(6): 691. 缪磊, 董再励, 陈浩然, 李文荣, 王越超. Displacement measurement of a thermally actuated polymer micro robotic gripper using the optical focus method[J]. Infrared and Laser Engineering, 2005, 34(6): 691.
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