红外与激光工程, 2004, 33 (1): 21, 网络出版: 2006-05-25
一种纳米精度偏振干涉仪光学系统的研究
Research on a kind of polarized interferometer's optical system for nanometer measurement
摘要
本干涉仪采用偏振测量和偏振接收装置.对干涉仪光路中激光的偏振态转换进行了详细的理论分析,对偏振干涉仪以及双频干涉仪的研制具有借鉴意义.该装置的重复性试验表明干涉仪重复性在30 nm之内,说明干涉仪的性能比较可靠.如果对环境条件进行严格的控制,会得到更高的测量精度,有望实现纳米精度测量.
Abstract
The interferometer adopted polarized light measurement and polarized light receiver is presented. The transform of the polarized light is analyzed in detail, which can help the design of polarized interferometer and dual-frequency interferometer. The repeatitiveness test indicates that the interferometer's measurement accuracy of repeatitiveness is within 30 nm. The result shows that the interferometer is reliable.If the effects of the environmental factors on the measurement accuracy and the compensation for the enviromental changes are studied, the measurement accuracy will be nanometer level.
郭新军, 王霁, 严家骅, 周自力. 一种纳米精度偏振干涉仪光学系统的研究[J]. 红外与激光工程, 2004, 33(1): 21. 郭新军, 王霁, 严家骅, 周自力. Research on a kind of polarized interferometer's optical system for nanometer measurement[J]. Infrared and Laser Engineering, 2004, 33(1): 21.
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