主动抗振技术是目前抗振干涉仪中研究的难点,其代价小、易于实现的方案是机电反馈式.在这种技术中振动信号的探测很关键,基于文中提出的采用单个光电二极管探测相位的抗振技术,获取的相位量数字化后由数字信号处理器分析得到应该补偿的振动量,送压电陶瓷(PZT)进行补偿.论述了系统各部分的工作原理和电路设计,并给出了实验结果.实验表明,本方案对于小于100wave·Hz的振动具有较好的效果.

Active vibration-resistant techniques in interferometer are applied to eliminate the effects of environmental disturb, the mechano-electronic feedback method is one of the low-cost way to fulfill these techniques. The detection of vibrational signal is the key part of this method, in this case, a single photodiode is used to detect optical phase of the interference fields in order to obtain the vibrational signal. The optoelectronic signal concerning with the vibration is digitalized and analyzed by DSP, then a feedback voltage is produced to PZT phase shifter which can compensate the change of optical path difference due to vibration. The principles of each part of this vibration-resistant system are described including the circuit design. Experimental results indicate that this method is an effective way to control the vibration with amplitude-frequency product less than 100 wave·Hz