简述了深紫外和频晶体CLBO的光学特性.根据相位匹配角公式、非线性有效系数公式、走离角公式和允许角公式,详细计算了CLBO晶体和频产生193 nm激光时的相位匹配角、非线性有效系数、和频时谐波走离角、允许角的具体数值.根据这些数值,并考虑产业化的要求,对目前几种和频方式进行了比较,最终选定波长为λ₁=2 100 nm的o光和波长为λ₂=213 nm的e光作为基频光进行和频的匹配方式.此方式相位匹配角为51.6°,具有大的非线性有效系数0.97,小的走离角3.7°,大的允许角1.9×10^-6 rad·mm,是非常理想的产生193 nm激光的匹配方式.

The properties of nonlinear frequency conversion in a new deep ultraviolet sum-frequency crystal CLBO were discussed. The data for sum-frequency CLBO crystal generating 193 nm laser of phase-matching angle, effective nonlinear coefficient, walk-off angle and maximum acceptance angle were calculated. According to those data and taking account of lasers commercialization requirements, several phase-matching projects were compared. At last, the phase-matching type of 2 100 nm(o)+213 nm(e)→193 nm(e) was selected. The phase-matching type of 2 100 nm(o)+213 nm(e)→193 nm(e) with large effective nonlinear coefficient of 0.97, small walk-off angle 3.7° and big acceptance angle 1.9×10^-6 rad·mm was proved to be the optimum for generating 193 nm laser.