建立了由改造的原子力显微镜(AFM)、精密回转气浮轴系、辅助转位轴系等组成的靶丸表面形貌精密测量系统,气浮轴系的回转精度达0.049μm,实现了对激光核聚变靶丸3个正交方向上完整圆周迹线的测量.对选定靶丸的测量数据进行了球度、表面粗糙度及功率谱分析.结果表明:其球度值为0.42μm;模数范围为2～10,11～50,51～100及101～1 000对应的表面粗糙度值平均为105.7,12.2,6.2,18.25nm;并得出了平均1维功率谱-模数关系曲线.

A measurement apparatus which composes of a reformed atomic force microscope(AFM),a precision rotating air-bearing and a auxiliary transform rotary is developed.The spindle error is approximately 0.049 μm.This apparatus can measure the inertial confinement fusion(ICF) target's circles in three orthogonal orientations.With the measured data of given targets,the sphericity,surface roughness and power spectrum were analyzed.The results showed that the sphericity was approximately 0.42 μm,and the average surface roughnesses were 105.7,12.2,6.2 and 18.25 nm corresponding to the mode number in the range of 2~10,11~50,51~100,and 101~1000,respectively.The average one-dimensional spectrum as a function of the mode number was also calculated.