红外与毫米波学报, 2003, 22 (1): 56, 网络出版: 2006-05-10
光学滤波片薄膜镀制工艺中的监控技术模拟分析
SIMULATION STUDY FOR OPTICAL FILTER THIN-FILM DEPOSITION MONITORING
光通信 窄带通滤波器件 实时监控 模拟分析. optical fiber communication narrow-bandpass filter in-situ monitoring simulation study.
摘要
在窄带滤波器件的研制过程中,模拟分析了采用极值法对膜层厚度进行光学监控及其偏差对滤波器件光学特性的影响,并给出了一个4腔DWDM滤波片的理想工艺曲线以及模拟计算所得到光学特性的分布曲线,计算结果有利于指导高品质薄膜器件的研制,并研制出符合工业应用标准要求3腔和4腔的100GHz、200GHz的DWDM滤波片以及CWDM滤波片.
Abstract
The simulation study of the filter's optical character affected by the In-situ optical monitoring the layer thickness and its deviation during deposition process for the optical narrow band-pass filter thin film was reported. Both of the ideal monitor trace and the simulation of optical parameters distributing curve of the 4-cavity DWDM filter were given. The simulation results are very useful in the practice of high quality optical filter thin film deposition. The filters are designed to meet specific 100GHz,200GHz DWDM and CWDM bandwidth requirements, and the three and four cavity narrow band-pass filters are produced for the industry application.
张荣君, 谌达宇, 郑玉祥, 邬云骅, 李莉, 周鹏, 陈良尧. 光学滤波片薄膜镀制工艺中的监控技术模拟分析[J]. 红外与毫米波学报, 2003, 22(1): 56. 张荣君, 谌达宇, 郑玉祥, 邬云骅, 李莉, 周鹏, 陈良尧. SIMULATION STUDY FOR OPTICAL FILTER THIN-FILM DEPOSITION MONITORING[J]. Journal of Infrared and Millimeter Waves, 2003, 22(1): 56.
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