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一种新的铁电薄膜快速热处理工艺的研究

Study on a new and rapid heat-treatment process for fabricating lead zirconate titanate thin film

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摘要

使用一种新的快速热处理的方法制备出Pb(Zr0.52Ti0.48)O3(PZT)薄膜,该方法的主要设备为链式热处理炉,它主要分为三部分,即预热带、加热带和冷却带.溶胶的配制采用先通过减压蒸馏的方法得到干凝胶,再将干凝胶溶解在乙二醇甲醚中的方法得到.对干凝胶作了DSC-TG分析;对薄膜作了X-射线衍射分析,结果为纯的钙钛矿结构的晶相;在10kHz时薄膜的相对介电常数为235,介质损耗小于0.02;C-V特性曲线以及P-E电滞回线显示薄膜具有良好的铁电性能.

Abstract

A new and rapid heat treatment process for fabricating lead zirconate titanate, Pb(Zr 0.52 Ti 0.48 )O 3(PZT), ferroelectric thin films was developed. The main equipment of this heat treatment process is termed caterpillar furnace. The furnace is composed of three parts, including preheating, heating and cooling. The precursor solution were prepared by using a modified sol gel process, in which solid precursors of PZT were prepared through reduced pressure distillation first, and then the precursor was dissolved in 2 methoxyethanol(2 MOE) to form the sols for the spin coating deposition. The precursor was investigated by DSC TG, and the PZT thin film was investigated by XRD. XRD analysis shows that the thin film possesses single phase perovskite type structure. A dielectric constant and loss tangent of thin film were 235 and 0.02 at 10KHz, respectively. The capacitance voltage(C V) and Hysteresis loops of PZT films show that the films possess fine ferroelectric properties.

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中图分类号:TM221

基金项目:国家重点基础研究发展计划(2002CB613304);上海市重点学科建设资助项目

收稿日期:2003-08-07

修改稿日期:2003-11-28

网络出版日期:2004-04-01

作者单位    点击查看

李建康:西安交通大学电子材料研究所,陕西,西安,710049
姚熹:西安交通大学电子材料研究所,陕西,西安,710049

备注:李建康(1966-),男,山西运城人,太原理工大学副教授,博士,主要从事铁电薄膜材料的研究.

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【3】Scott J, Paz C. De Araujo. Pyroelectric Devices and Materials[J]. Rep. Phys, 1986, 49:1335-1386

【4】Burill L A, Brook K G. Crystallization of sol-gel derived lead-zirconate-titanate thin films in argon and oxygen atmospheres[J]. Appl. Phys. , 1994, 75(9): 4501-4509

【5】Zeng Jianming, Song Shigeng, Wang Lianwei, et al. Sol-gel Preparation of Pb( Zr0. 5Ti0.5 )O3 Ferroelectric Thin Films Using Zirconium Oxynitrate as the Zirconium Source[J]. Am.Ceram. Soc. , 1999, 82:461-466

【6】Wu Xiao-Qing, Ren Wei, ZHANG Liang-Ying, et al. Relation between properties of PLT ferroelectric thin films and thermal annealing processes [J]. Piezoelectrics and Acoustooptics(吴小清,任巍,张良莹,等.镧钛酸铅铁电薄膜的性能与热处理工艺的关系.压电与声光),1997,19(5):409-414

【7】Weiguo Liu, Jong Soo Ko, Weiguang Zhu. Preparation and properties of multilayer Pb( Zr, Ti ) O3/PbTiO3 thin films for pyroelectric application [ J ]. Thin Sold Films, 2000, 371:254-258

【8】Song Zhitang, Wei Ren, Wang Shixin. Structural and abnormal electrical properties of excess PbO-doped lead lanthanum titanate thin films [ J ]. Phys. D: Appl. Phys. , 2000,33: 764-772

【9】Tomita Katsuhiko, Takamuro Daisuke, Samada Kazuaki. Electron emission type infrared imaging sensor using ferroelectric thin plate [J]. Sensors and Actuator A, 2002, 98:147-152

引用该论文

李建康,姚熹. Study on a new and rapid heat-treatment process for fabricating lead zirconate titanate thin film[J]. Journal of Infrared and Millimeter Waves, 2004, 23(2): 91-94

李建康,姚熹. 一种新的铁电薄膜快速热处理工艺的研究[J]. 红外与毫米波学报, 2004, 23(2): 91-94

被引情况

【1】李建康,姚熹. Pb(Zrx,Ti1-x)O3成分梯度铁电薄膜的制备、结构及电性能表征. 红外与毫米波学报, 2005, 24(4): 250-254

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