应用激光, 2005, 25 (5): 289, 网络出版: 2006-05-10
高功率紫外激光切割铜薄膜的实验研究
Experimental Research on High Power UV Laser Cutting Cu Membrane
摘要
通过改变气氛条件及加工工艺参数,研究高功率紫外激光切割铜薄膜的切割性能及影响因素,并且利用正交实验设计的方法,确定了影响切缝宽度和切割质量的主次因素.在实验的基础上,成功的利用高功率三倍频紫外激光制作出高质量的铜质薄膜器件.
Abstract
A serials of experiments have been carried out on the high power UV Laser cutting Cu Membrane.Through changed the different aid-gases conditions and technological parameters,the width and quality of laser-cutting gaps have been investigated.With an orthogonal array the primary and secondary effect factors on laser cutting Cu Membrane have been confirmed.Based on the results of experiments,some Cu membrane micro-apparatus have been fabricated successfully.
阳建华, 张帅, 陈继民. 高功率紫外激光切割铜薄膜的实验研究[J]. 应用激光, 2005, 25(5): 289. 阳建华, 张帅, 陈继民. Experimental Research on High Power UV Laser Cutting Cu Membrane[J]. APPLIED LASER, 2005, 25(5): 289.
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