应用激光, 2004, 24 (4): 217, 网络出版: 2006-05-10
微纳米颗粒的激光去除
Areview of nano or micro particles by laser heating
摘要
微纳米颗粒的去除是半导体、微电子、微型机械、精密光学等高新技术中的关键问题,而常规清洗方法难以有效去 除。近年来国际上发展的DLC、SLC激光去除方法非常有效,本文对DLC、SLC的实验方法、去除机制、影响因素和规律等进 行综述,指出了存在的问题。
Abstract
The removal of nano or misro particles is the key problem in semiconductor,microelectronics,MEMS and optics industry.Traditional cleaning trchniques are ineffective to remove sugh small particles,however it shows DLC,SLC are very effevtive.Inthis paper,it reviews the applied experimental methods.echanism of particle removal,influencing factors and tendency.It demonstrates some existing problems should be dealt with in the future.
金仁喜, 淮秀兰. 微纳米颗粒的激光去除[J]. 应用激光, 2004, 24(4): 217. 金仁喜, 淮秀兰. Areview of nano or micro particles by laser heating[J]. APPLIED LASER, 2004, 24(4): 217.
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