准分子激光在激光光刻和微细加工中有广泛的应用,要求激光具有好的稳定性和光束波面均匀性.介绍了准分子激光的波面特性以及波面分析测量技术.用波面分析仪对XeCl和ArF激光特性进行全面的测量和评估,给出了主要参数的测量结果,重点分析了光束均匀性.

As widely applied in laser lithography and laser micromachining, excimer laser should have high stability and uniformity of beam intensity profile. This paper introduces the beam profile characteristics of excimer lasers and the beam profilometry. Experimentally, beam intensity profile of a XeCl laser and an ArF laser were diagnosed and evaluated by employing a computer with beam profile analyzer. The beam uniformity were also emphatically measured and discussed.