强激光与粒子束, 2004, 16 (7): 825, 网络出版: 2006-05-15
基于硅微加工技术的新型变形反射镜
Novel deformable mirror based on silicon micromachining technology
变形反射镜 体微加工 静电驱动 凸角补偿 阳极键合 Deformable mirror Bulk micromachining Electrostatic actuating Corner compensation Anodic bonding
摘要
给出了一种基于硅微加工技术的新型变形反射镜的设计和加工方法.变形反射镜镜面主体是由一定厚度的硅膜构成,硅膜上表面溅射有一层Ti/Au,背面有一7×7阵列的台柱与之相连,台柱下方是对应的驱动电极.当给电极施加电压时,产生的静电力就会拉动台柱向下运动,从而使相应的镜面部分发生变形;通过控制通电电极的位置及电压,就可获得特定的镜面形状.在变形反射镜的加工工序中采用浅腐蚀形成键合台,采用深腐蚀加工出台柱.并采用<110>条补偿图形对台柱的凸角进行补偿,在0.2MPa气压下进行键合,最后成功研制出有效反射面积为30mm×30mm,拥有49个静电驱动单元的变形反射镜.
Abstract
Based on silicon micromachining technology, a novel deformable mirror with 30mm×30mm effective reflecting surface and 49 actuators is designed and fabricated. It is composed of a silicon membrane, at the back of which is attached by a 7×7 pillars array. The pillars and bonding part are fabricated through two etching steps with different depth. In terms of optimization, a <110> strip pattern is designed specially for the convex corner compensation during the etching process, and the anodic bonding process is performed under 0.2MPa atmospheric pressures.
余洪斌, 陈海清, 张大成, 竺子民, 李婷. 基于硅微加工技术的新型变形反射镜[J]. 强激光与粒子束, 2004, 16(7): 825. YU Hong-bin, CHEN Hai-qing, ZHANG Da-cheng, ZHU Zi-min, LI Ting. Novel deformable mirror based on silicon micromachining technology[J]. High Power Laser and Particle Beams, 2004, 16(7): 825.