基于分束镜反射率和透射率的乘积为衡量标准的原则,设计了13.9nm软X射线激光干涉测量所需的多层膜分束镜,用磁控溅射法在有效面积达10mm×10mm,厚100nm的氮化硅窗口上镀制Mo/Si多层膜,实现了分束镜制作.用表面轮廓仪实测分束镜面形精度达到nm量级,同步辐射反射率计测试表明,分束镜的反射率和透射率乘积约4%.

The soft X-ray laser Mach-Zehnder interferometer is an important tool to measure the electron densities of a laser-produced plasma near the critical surface. The design of a multilayer beam splitter at 13.9nm for soft X-ray laser Mach-Zehnder interferometer is completed based on the standard of maximizing product of reflectivity and transmission of the beam splitter. The beam splitters which is Mo/Si multilayers on 10mm×10mm area Si₃N₄ membrane are fabricated using the magnetron sputtering. The figure error of the beam splitter has reached the deep nanometer magnitude by using optical profiler and the product of reflectivity and transmission measured by synchrotron radiation is up to 4 %.