用波长1.06μm的激光透射反射自动扫描装置扫描了激光辐照前后薄膜的反射比和透射比.薄膜样品的工作波长为1.06μm.将扫描结果与相衬显微镜观察到的形貌相对照.实验结果表明,用透射反射扫描法不仅能反映出相衬显微镜所能观察到的损伤,而且也能发现某些显微镜所不能发现的损伤.由于透射比和反射比可以反映出薄膜对激光的传输性能,因此也能反映出薄膜能否继续工作,以此来判定损伤与否.因此用透射反射扫描法可以作为检测损伤的手段,由于简单易行,可以在线检测.避免目前损伤测试工作中繁重的人工操作.

The transmission and reflectance of optical thin film were tested using the scan facility at 1.06μm. Scan lines were drawn from the experimental data. The scan lines of two kinds of thin film were analyzed. By using the method, the first kind of damage which is obvious by microscope could be detected accurately, some of the second kind of damage which is not obvious by microscope could also be found. The comparison between scan results and microscope observation shows that the scan method is of higher sensitivity. The reason why the scan method is more sensitive than microscope was discussed. As it is easy to establish the facility, it can be used for online test.