强激光与粒子束, 2002, 14 (5): 723, 网络出版: 2006-05-15
电子束激励KrF激光放大器稳定运行的重要技术问题
Important technological problems with stable operation of electron beam pumped KrF excimer laser amplifier
大面积电子束激励KrF准分子激光放大器 脉冲传输线 二极管阳极膜 二极管后脉冲 large area electron beams pumped KrF excimer laser pulse transmission line diode anode foil diode post pulse
摘要
介绍了用于天光一号高功率氟化氪(KrF)准分子激光系统中的电子束双向激励主放大器稳定运行中必须解决的一些重要技术问题:水介质脉冲传输线中的绝缘支撑击穿问题;大面积电子束二极管阳极膜的安装;与压力膜接触处Hibachi筋的形状;二极管后脉冲的形成及其对阳极膜和阴极发射体造成的损害等问题.还着重描述了主开关导通时刻对二极管后脉冲的影响及最佳导通时刻的确定.
Abstract
Some important technological problems with stable operation of the two side electron beam pumped main amplifier used in the "Heavn 1" high power KrF excimer laser system are described. They are the problems of the electric breakdown of the insulator support for water dielectric transmission lines, anode foil installation of large area electron beam diode, shape of Hibachi ribs that contact the pressure foil, and formation of diode post pulses and their damage to the anode foil and cathode emitter. Emphasis is put on the effect of different main switch breakdown times on diode post pulses and the determination of the optimal breakdown time.
马维义, 马景龙, 胡凤明, 单玉生, 王乃彦. 电子束激励KrF激光放大器稳定运行的重要技术问题[J]. 强激光与粒子束, 2002, 14(5): 723. 马维义, 马景龙, 胡凤明, 单玉生, 王乃彦. Important technological problems with stable operation of electron beam pumped KrF excimer laser amplifier[J]. High Power Laser and Particle Beams, 2002, 14(5): 723.
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