非平衡磁控溅射镀膜机中的磁场分布对镀膜有着重要的影响.介绍一种利用有限元法求解非平衡磁控溅射镀膜机中带电线圈所产生的磁场的方法.根据电磁场理论,推导出求解带电线圈所产生的磁场的计算模型,利用基于有限元法的ANSYS软件对非平衡磁控溅射镀膜机中线圈所产生的磁场分布进行了数值模拟.通过与实测值进行比较,验证了计算模型和计算结果的可靠性.总结了非平衡磁控溅射镀膜机中的磁场分布情况,为优化镀制薄膜设计方案和提高薄膜质量提供了参考依据.

The magnetic-field distribution of non-balance magnetron sputtering coating equipment has a serious effect on film coating.A method that with the finite element method solves for magnetic-field generated by live coil in non-balance magnetron sputtering coating equipment is introduced.Based on the theory of electromagnetic-field,the calculation model of magnetic-field generated by live coil had been deduced and with the ANSYS based on finite element method,the magnetic-field distribution caused by the coil in non-balance magnetron sputtering coating equipment was simulated.The reliability of calculation model and results were verified by comparison with practical measurement results.The magnetic-field distribution of non-balance magnetron sputtering coating equipment is summarized,and it provide reference for optimizing a design plan of coating and improving the quality of thin films.